Eniko T Enikov

Abstract:

This paper describes the assembly experiments with a novel miniature assembly cell for micro-electromechanical systems (MEMS). The cell utilizes a transparent electrostatic gripper and uses several disparate sensing modalities for position control: computer vision for part alignment with respect to the gripper, a fiber-coupled laser, and a position sensitive detector (PSD) for part to assembly alignment. Assembly experiments indicate that the gripping force and stage positioning accuracy are sufficient for insertion of 500μm wide parts in 550 μm wide slots etched in silicon wafers. Details on the cell operation, the control algorithm used and their limitations are also provided. Potential applications of the developed assembly cell are assembly of miniature optical systems, integration of optoelectronics, such as laser diodes with CMOS, and epitaxial lift-off (ELO) of thin films used in optoelectronic devices. Copyright © 2004 by ASME.

Abstract:

This paper presents a low-cost hands-on experiment for a classical undergraduate controls course for non-electrical engineering majors. The setup consists of a small dc electrical motor attached to one of the ends of a light rod. The motor drives a 2-in propeller and allows the rod to swing. Angular position is measured by a potentiometer attached to the pivot point. A custom-designed circuit board produces the controlled voltage input to the motor. The target board is powered and communicates with the PC through its USB port using a virtual RS-232 port. A simple MATLAB/Simulink module has been created to read the pendulum angle and send a command signal to the motor. The module is based on Real-time Windows Target software, which allows a sampling rate of up to 200 Hz. Students are able to design and test classical PID and phase lead-lag controllers, as well as modern controllers, including state-space controller design combined with feedback linearization. A semester-long series of assignments is described that can be carried out without the need for a specialized laboratory or teaching assistants. The project was tested in a classical control systems design class of senior-level mechanical engineering students. Student feedback and survey data on the effectiveness of the modules are also presented.

Abstract:

A gas or vapor compressor is one of the key components of many engineering systems, such as certain designs of vapor compression refrigeration systems, cryo-coolers, air handlers. For meso-scale systems with linear dimensions of a few centimeters, conventional designs do not work efficiently because of rather large relative tolerances, and hence these meso-scale systems require micro-fabricated components for efficient operation. This paper presents a meso-scale centrifugal compressor fabricated by photo-lithographic techniques. A preliminary design based on 1-D flow analysis using air as the working fluid shows that a 50 mm diameter centrifugal compressor with a blade height of 200 μm gives a static pressure ratio of 1.12. In this design, the impeller has 10 full blades and 10 splitter blades. Each blade has the NACA profile 9510 with the maximum camber at 50% of the chord. These impeller blades have exit angles 35° with exit flow angles of 60°. A vaned diffuser having 20 equally spaced vanes with the same NACA profile is used to improve compressor efficiency. A 3-D compressible, viscous flow analysis has been done using a commercial finite volume software. The results of this analysis allowed the verification of the flow characteristics inside the meso-scale centrifugal compressor. The compressor has been fabricated using micro-fabrication techniques. The rotor and the stator are made by etching a silicon wafer by using DRIE (Deep Reactive Ion Etching) technique. A Pyrex wafer is then bonded to the stator for visual access inside the compressor.

Abstract:

Scanning probe microscopy(SPM)-based nanolithography with injected charges into layered electrets, such as silicon dioxide (SiO2) and silicon nitride, is a promising tool with far-reaching applications, such as controlled nano-assembly of macro-molecules and data storage. Despite its potential, some practical limitations exist. This paper describes an experimental investigation of the process of charging and charge dissipation in SiO2 using an AFM probe tip and surface potential (Kelvin probe) microscopy. The stability of charge bits on hexamethyl disilazane(HMDS)-treated SiO2 under low dielectric constant liquids, fluorocarbon, and benzene has been demonstrated. Results from a numerical simulation of a theoretical charging model, in which the charge traps are assumed to be localized on the silicon/SiO2 interface, are also presented. The charge transport mechanism considered is modified Fowler-Nordheim tunneling. © 2005 Elsevier B.V. All rights reserved.

Abstract:

This paper examines the design and testing of a novel extrusion system for the biocompatible coating of drug delivering micro-robots. The encapsulation system creates monodisperse droplets of sodium alginate containing the micro-robots within a coaxial laminar flow of a continuous oil phase. The extrusion process allows the experimenter to control the size of the drug carrying droplets which have been subsequently tested as vehicles to deliver a model drug (Horseradish peroxidase). Comparison with other coating techniques such as dip-coating shows significant increase in the drug storing capacity. A demonstration of the use of ultrasound as a possible trigger of the drug release has also been presented. The significant increase in the observed drug release rate shows enhancement over previously tested passive diffusion and magnetic modulation methods. Together, these two aspects of micro-robotic drug delivery concept introduce a new approach to drug-delivering microrobots with large drug-storage capacity, ability to propel the robots using magnetic forces, and trigger the drugrelease by remote application of ultrasonic stimulation. ©2009 IEEE.